Microscopic imaging device and imaging method

• Main Authors: WANG CHUNHUI, RU JIAYU, WANG TIAN, LIU SIYING, ZHANG KAILAI, ZHU XUELIANG
• Format: Patent
• Language: Chinese; English
• Published: 14.07.2023
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

The invention discloses a microscopic imaging device and an imaging method, and belongs to the technical field of optical precision measurement. The problem that the transverse resolution is two orders of magnitude lower than the axis resolution in the existing confocal microscopy technology is solved. The device comprises a beam splitter prism, a measuring objective lens, a bifocal lens, an object to be measured, a pinhole and a photoelectric detector, the object to be measured is arranged on the side, away from the beam splitter prism, of the measuring objective lens and used for reflecting the transmission light gathered through the measuring objective lens to form first reflected light, so that the first reflected light is reflected to the bifocal lens through the beam splitter prism; the bifocal lens is arranged between the beam splitter prism and the pinhole and is used for enabling the first reflected light and the second reflected light which pass through the beam splitter prism to form interference f