Water immersion type ultrasonic scanning microscope sample conveying device and control method

• Main Authors: ZHAO YINGWEI, REN ZESHENG, WU AIHUA, ZHANG HUI, QIN TIAN, ZHANG WENPENG, WANG JUNPENG, CHENG YITAO, CAO JIAN
• Format: Patent
• Language: Chinese; English
• Published: 07.07.2023
• Subjects: CONVEYING; HANDLING THIN OR FILAMENTARY MATERIAL; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PACKING; PERFORMING OPERATIONS; PHYSICS; PNEUMATIC TUBE CONVEYORS; SHOP CONVEYOR SYSTEMS; STORING; TESTING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

The invention is suitable for the technical field of integrated circuit test equipment and instruments, and provides a water immersion type ultrasonic scanning microscope sample conveying device and a control method, the device comprises a wafer bearing table, a pulley, a guide rail, a guide rail bracket, a push-pull driving mechanism, a liquid tank and a bottom plate; the bottom plate is arranged on the bottom wall of the liquid tank, the guide rail support is arranged on the bottom plate, the guide rail is arranged on the guide rail support, the tackle is arranged on the guide rail, and the wafer bearing table is arranged on the tackle; the heights of the two ends of the guide rail are different, the lower end of the guide rail is lower than a preset height, and the preset height is the liquid level height of liquid contained in the liquid tank; and the push-pull driving mechanism is arranged on the bottom plate of the liquid tank, is connected with the tackle and can control the tackle to move between the