Preparation method of TiN/TiO2/alpha-Al2O3 coating based on high-power pulse magnetron sputtering technology

• Main Authors: FENG LIMIN, HU JIANNAN, LI JIANZHONG, YU KAI, WU JINGYI, HE ZHEQIU, SHI JUNJIE, GAO XUANWEN
• Format: Patent
• Language: Chinese; English
• Published: 04.07.2023
• Subjects: ADDITIVE MANUFACTURING TECHNOLOGY; ADDITIVE MANUFACTURING, i.e. MANUFACTURING OFTHREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVEAGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING,STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING; CASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MAKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; METALLURGY; PERFORMING OPERATIONS; POWDER METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING; WORKING METALLIC POWDER

The invention discloses a TiN/TiO2/alpha-Al2O3 coating preparation method based on a high-power pulse magnetron sputtering technology, which is characterized by comprising the following steps: S1, carrying out ion cleaning on a substrate; s2, stopping in front of the Ti target, and carrying out pulse reactive sputtering at the power of 8-15kW to obtain a TiN transition layer; s3, stopping in front of the Ti target, and carrying out pulse reactive sputtering with the power of 10-15 kW to obtain a TiO2 transition layer; and S4, stopping in front of the Al target, and carrying out high-power pulse reactive sputtering to obtain an alpha-Al2O3 layer. The TiN/TiO2/alpha-Al2O3 coating prepared through high-power pulse magnetron sputtering has the advantages of being high in hardness, high in thermal stability and low in friction coefficient, the hardness of the obtained multi-layer coating can reach 27 GPa or above, meanwhile, the friction coefficient is lower than 0.1, and high thermal stability and chemical stabil