Liquid-phase reaction circulation system of micro-nano metal paste and preparation method of liquid-phase reaction circulation system

• Main Authors: CUI CHENGQIANG, YANG KAI, YANG GUANNAN, HUANG GUANGHAN, ZHANG YU, HUANG WENJUN, PENG LINFENG
• Format: Patent
• Language: Chinese; English
• Published: 04.07.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEMICONDUCTOR DEVICES; THEIR RELEVANT APPARATUS; TRANSPORTING

The invention relates to the technical field of metallurgy and chip packaging interconnection, in particular to a micro-nano metal paste liquid phase reaction circulation system and a preparation method thereof.The micro-nano metal paste liquid phase reaction circulation system comprises a micro-nano metal paste preparation subsystem and a reaction liquid recycling subsystem; the reaction liquid conveying pipeline is used for conveying reaction liquid in the reaction bottle to the centrifugal tube; the clamping device is used for clamping and putting the centrifugal tube from the centrifugal device through the lifting device; the uncovering device is used for opening or covering a cover body of the centrifugal tube; the shifting device is used for translating the uncovering device; the liquid recovery pipeline is used for conveying the centrifugally separated liquid in the centrifugal tube to the liquid recovery bottle; and the liquid compensation pipeline is used for conveying liquid in the liquid recovery b