Size correction method of resonant structure for detecting dielectric constant of LTCC (Low Temperature Co-Fired Ceramic) material

• Main Authors: LU NAN, YU BING, HE FAWANG, GAO XIAO, LIU ZHENGUO, YANG MENGHONG, BAI HAO, CHEN JING
• Format: Patent
• Language: Chinese; English
• Published: 27.06.2023
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

The invention relates to a size correction method of a resonant structure for detecting dielectric constant of LTCC (low temperature co-fired ceramic) material, which comprises the following steps: designing a planar resonator structure, and setting initial resonant frequency; performing simulation by adopting an HFSS, and obtaining an actual resonant frequency through simulation; actual resonant frequencies corresponding to all sizes in the size range of parameterized scanning are obtained through simulation, and the actual resonant frequency consistent with the initial resonant frequency is found out; calculating a correction coefficient; and correcting the size of the planar resonator structure by adopting a correction coefficient. The method has the beneficial effects that according to the method for correcting the size of the resonant structure, through multiple times of simulation optimization, the resonant ring patterns with different resonant frequencies are adopted for verification, correction coeffi