Resonant NO2 gas sensing structure, preparation method thereof, test system and test method

• Main Authors: ZHOU SIYUAN, HAN SHUQI, HOU LIUYU, ZHANG SHUAI, GENG WENPING, LI QIANNAN, GUO MIAOLI, NIU YAOKAI, ZHANG SHENGGUO, ZHUANG YAN, MEI LINYU, BI KAIXI, MU JILIANG, CHOU XIUJIAN
• Format: Patent
• Language: Chinese; English
• Published: 27.06.2023
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; TESTING; TRANSPORTING

The embodiment of the invention provides a resonant NO2 gas sensing structure. The resonant NO2 gas sensing structure comprises a gate substrate; the insulating layer is arranged on the grid substrate; the electrode layer is arranged on the insulating layer and mainly comprises a source electrode and a drain electrode which are positioned on the insulating layer at an interval; the channel is arranged on the insulating layer and is positioned between the source electrode and the drain electrode; the graphene single-layer film is arranged on the electrode layer and suspended above the channel; the gas sensing structure is simple in structure and preparation process, low in preparation cost, low in power consumption, high in gas quality sensitivity, high in compatibility, beneficial to integration and capable of achieving batch preparation. 本申请实施例提供一种谐振式NO2气体传感结构，包括：栅极基底；绝缘层：设置于栅极基底上；电极层：设置于绝缘层上，主要由间隔位于绝缘层上的源极电极和漏极电极构成；沟道：设置于绝缘层上，且位于源极电极和漏极电极之间；石墨烯单层薄膜：设置于电极层上，且悬浮于沟道的上方；本申请中的气体传感结构，结构和制备工艺简单，制备成本低，功耗低，气体质量灵敏度高，