Detection system and detection method of composite structure

• Main Authors: HE WEI, HU JICHUANG, CHEN ZHIMING, ZHANG JINGLONG, ZHANG ZIHAO, ZHANG YUEXIN
• Format: Patent
• Language: Chinese; English
• Published: 23.06.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The invention relates to a detection system and a detection method of a composite structure, and belongs to the technical field of electron microscopes, an EDS detector is placed in an objective lens, the space utilization rate is improved, the EDS is closer to a pole shoe head and a sample surface, and the detection efficiency is improved; the system comprises an electron source, an electron accelerating electrode, an objective lens, an EDS detector, a sample, a sample table and a control unit, the electron source is arranged in the center of the top, the electron accelerating electrode is arranged below the electron source, the objective lens is arranged below the electron accelerating electrode, and the sample is arranged below the objective lens; electron beams generated by the electron source sequentially pass through the electron accelerating electrode and the objective lens and then reach the surface of a sample; the EDS detector is arranged in the objective lens in an oblique insertion mode, and a pro