Processing technology for increasing adhesive force of target material

• Main Authors: LI CHUANYIN, ZHOU ZHAOYIN, ZHOU ZHAOYU, WANG SHAN
• Format: Patent
• Language: Chinese; English
• Published: 09.06.2023
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention relates to the field of magnetron sputtering target material processing, in particular to surface metallization treatment on a target material, and particularly relates to a processing technology for increasing the adhesive force of the target material. The invention provides a processing technology for increasing the adhesive force of a target material. The processing technology comprises the following steps: carrying out pretreatment operation on the surface of the target material; coating a metal layer on the surface of the pre-treated target material; the pretreatment operation specifically comprises the steps of carrying out corona treatment on the surface of the target material, eroding the surface of the target material and forming a plasma active layer on the surface of the target material. According to the processing technology, before the surface of the target material is coated with the metal layer, the adhesive force of the surface of the target material is improved firstly, so that