Mach-Zehnder electro-optical modulator and modulation method

• Main Authors: PENG YU, MIAO RONGSHENG, WEI HONGZHEN, LI ZEBIN, WAN LIWEI, ZHENG XUEYAN
• Format: Patent
• Language: Chinese; English
• Published: 06.06.2023
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

The invention provides a Mach-Zehnder electro-optical modulator and a modulation method, the modulator comprises a silicon substrate layer, a first silicon dioxide layer covers the silicon substrate layer, a first coplanar waveguide electrode is embedded in the first silicon dioxide layer, a waveguide layer covers the first silicon dioxide layer, and a second coplanar waveguide electrode is embedded in the waveguide layer. The first coplanar waveguide electrode is in contact connection with the waveguide layer; a second coplanar waveguide electrode is arranged on the surface, deviating from the first silicon dioxide layer, of the waveguide layer; a second silicon dioxide layer is coated in a gap formed by the waveguide layer and the second coplanar waveguide electrode; wherein the first coplanar waveguide electrode and the second coplanar waveguide electrode are used for applying voltage signals with the same frequency and the same phase. 本申请提供了一种马赫曾德尔电光调制器及调制方法，所述调制器包括硅基底层，所述硅基底层上覆设有第一二氧化硅层，所述第一二氧化硅层中嵌设有第一共面