Purification system and purification method of electronic-grade octafluorocyclobutane

• Main Authors: ZUO CHUNYU, TIAN DINGLEI, ZHAO XINXIN, MIAO BAOYU, XU HAOYANG, GE GUANGYE, DING CHEN, LI HANSHENG
• Format: Patent
• Language: Chinese; English
• Published: 06.06.2023
• Subjects: ACYCLIC OR CARBOCYCLIC COMPOUNDS; CHEMISTRY; METALLURGY; ORGANIC CHEMISTRY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEPARATION; TRANSPORTING

The invention discloses a purification system and a purification method of electronic-grade octafluorocyclobutane, and belongs to the technical field of octafluorocyclobutane purification. According to the technical scheme, the method comprises the following steps: S1, condensing to-be-purified liqu...