Purification system and purification method of electronic-grade octafluorocyclobutane

The invention discloses a purification system and a purification method of electronic-grade octafluorocyclobutane, and belongs to the technical field of octafluorocyclobutane purification. According to the technical scheme, the method comprises the following steps: S1, condensing to-be-purified liqu...

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Bibliographic Details
Main Authors ZUO CHUNYU, TIAN DINGLEI, ZHAO XINXIN, MIAO BAOYU, XU HAOYANG, GE GUANGYE, DING CHEN, LI HANSHENG
Format Patent
LanguageChinese
English
Published 06.06.2023
Subjects
ACYCLIC OR CARBOCYCLIC COMPOUNDS
CHEMISTRY
METALLURGY
ORGANIC CHEMISTRY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
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Summary:The invention discloses a purification system and a purification method of electronic-grade octafluorocyclobutane, and belongs to the technical field of octafluorocyclobutane purification. According to the technical scheme, the method comprises the following steps: S1, condensing to-be-purified liquid octafluorocyclobutane to separate noncondensable gas, so as to obtain an octafluorocyclobutane liquid crude product; s2, vaporizing the octafluorocyclobutane liquid crude product; s3, feeding the vaporized octafluorocyclobutane into a drying adsorption tower filled with a modified molecular sieve to remove water and CO2, and then feeding the vaporized octafluorocyclobutane into an adsorption tower filled with fluorinated modified activated carbon to remove impurities with boiling points similar to those of the octafluorocyclobutane; s4, condensing the octafluorocyclobutane obtained in the step S3, feeding the condensed octafluorocyclobutane into a degassing tower, and carrying out light component removal rectifi
Bibliography:Application Number: CN202310476141