Thickness measuring method and system based on temperature compensation of thickness gauge and related equipment

• Main Authors: DENG JINGYANG, FAN BIN, YAN JUNJING, LIU XIAOQI, XIE YAOCHENG, XU DIHUA
• Format: Patent
• Language: Chinese; English
• Published: 02.06.2023
• Subjects: CALCULATING; COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS; COMPUTING; COUNTING; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention discloses a thickness measuring method and system based on temperature compensation of a thickness gauge and related equipment. The method comprises the following steps: measuring the thickness of a to-be-measured product according to the thickness gauge; the internal temperature value of the detector in the thickness gauge and the detector output average value corresponding to the internal temperature value are obtained, and the detector output average value corresponding to the internal temperature value is the average value of the detector output values under the internal temperature value; obtaining a detector compensation output value through a preset detector temperature compensation model according to the internal temperature value and the detector output mean value; and obtaining the measured thickness value of the product to be measured according to the compensation output value of the detector. According to the invention, the accuracy of thickness measurement is improved. 本发明公开了一种基于测厚仪