Implantable pressure sensor package

The present invention provides an implantable sensor device, the implantable sensor device comprising: a sensor support substrate; a micro electro mechanical system (MEMS) pressure sensor device mounted to the sensor support substrate; the transduction medium is applied to the upper part of the pres...

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Bibliographic Details
Main Authors SIEMONS ALEXANDER H, FRICK MARK STEVEN, Y. KEDAR, WU MH
Format Patent
LanguageChinese
English
Published 23.05.2023
Subjects
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