Implantable pressure sensor package
The present invention provides an implantable sensor device, the implantable sensor device comprising: a sensor support substrate; a micro electro mechanical system (MEMS) pressure sensor device mounted to the sensor support substrate; the transduction medium is applied to the upper part of the pres...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
23.05.2023
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Subjects | |
Online Access | Get full text |
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