Semiconductor wafer detection device and detection method thereof

The invention discloses a semiconductor wafer detection device, which comprises a base, a driver, a displacement sensor, a contact pin, a product fixing device and a display, and further comprises a trigger detection device, a signal processing device, a signal processing device, a signal processing...

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Bibliographic Details
Main Author LU JINFA
Format Patent
LanguageChinese
English
Published 23.05.2023
Subjects
BASIC ELECTRIC ELEMENTS
DETECTING MASSES OR OBJECTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GEOPHYSICS
GRAVITATIONAL MEASUREMENTS
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:The invention discloses a semiconductor wafer detection device, which comprises a base, a driver, a displacement sensor, a contact pin, a product fixing device and a display, and further comprises a trigger detection device, a signal processing device, a signal processing device, a signal processing device and a signal processing device, wherein the driver is arranged on the base, the contact pin is arranged on the displacement sensor, and the product fixing device is arranged on the base; the displacement sensor comprises a connecting pipe, a sliding rod, a conductive block, two metal blocks, three air pipes and a light-emitting part, one end of the sliding rod can slide in the connecting pipe, the two sliding blocks are arranged on the sliding rod, the light-emitting part is arranged on the base, and the displacement sensor is arranged on the sliding rod; the driving device is arranged on the driver and used for driving the trigger detection device to move up and down; a light sensor; a pressure sensor; and
Bibliography:Application Number: CN202211092406