Clamping device for focused ion beam equipment and focused ion beam equipment

• Main Authors: ZHAO SHIYAN, HUANG SILING, WANG DASEN, GUO HAILIN, NIE FENGMING, LI WEIJIE, XIA CHAOXIANG, ZHANG XU, PEI NING
• Format: Patent
• Language: Chinese; English
• Published: 23.05.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

The invention relates to a clamping device for focused ion beam equipment. The clamping device comprises a base; the device is characterized in that the device further comprises a rotating part which is rotatably arranged on the base; the movement mechanism is arranged on the base and is used for driving the rotating part to rotate; and the chuck is arranged on the rotating piece and is used for clamping a sample. The invention further relates to the focused ion beam equipment applying the clamping device for the focused ion beam equipment. 本发明涉及一种用于聚焦离子束设备的装夹装置，包括基座；其特征在于：还包括转动件，可转动地设于所述基座上；运动机构，设于所述基座上、并用来驱动所述转动件转动；夹头，安装在所述转动件上、并用来夹持住样品。本发明还涉及一种应用有前述用于聚焦离子束设备的装夹装置的聚焦离子束设备。