Miniature probe station for Hall test of high-purity germanium single crystal and test method

• Main Authors: FENG DESHEN, MA YUANFEI, ZHANG HAITAO, XING JUN, WANG BO, JI MIAO, LIN QUAN, CHAI CHEN, LIU XIAOHUA, ZHANG HAIPENG, CAO LIN, GUO WEICAI, MO JIE
• Format: Patent
• Language: Chinese; English
• Published: 09.05.2023
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

The invention provides a micro probe station for Hall testing of a high-purity germanium single crystal and a testing method, and belongs to the technical field of Hall testing. The micro probe station for Hall testing of the high-purity germanium single crystal comprises a detection table and four probe assemblies; a rectangular sample wafer placing area is arranged on the upper end surface of the detection table; a circuit board is arranged in the detection table and is electrically connected with the Hall tester; the four probe assemblies are uniformly distributed on the periphery of the sample wafer placement area, and each probe assembly comprises a fixing piece, a limiting rod and a probe; the fixing piece is located at the upper end of the detection table and rotationally connected with the limiting rod; and the probe is connected to the other end of the fixed sheet and can be longitudinally adjusted. According to the micro probe station for the Hall test of the high-purity germanium single crystal, oh