Pressure sensor

• Main Authors: MATSUGI YASUAKI, NIIMURA YUSUKE, SEKINE MASASHI, ISHIHARA TAKUYA, SOEDA MASARU
• Format: Patent
• Language: Chinese; English
• Published: 09.05.2023
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

The purpose of the present invention is to reduce deformation of a sensor diaphragm due to heat transfer from a fluid to be measured, and to reduce the size of a support structure for a sensor element. A sensor element (40) of a pressure sensor is provided with a sensor diaphragm (41) that is deformed by the pressure of a fluid to be measured that flows into an inflow space (R2), and an annular support part (42) that supports the sensor diaphragm. A support structure (70) that supports a sensor element (40) is provided with a plate-like member (72) that covers a sensor diaphragm from the inflow space (R2) side, and a spacer (73) that is disposed between the sensor element and the plate-like member. The plate-like member (72) is provided with an introduction hole (72A) for introducing the fluid to be measured to the sensor diaphragm side, and the spacer is provided with an annular portion (73A) fixed to the support portion. An opposing portion (73B) extending from the annular portion and opposing the introduct