Etching equipment and photosensitive etching process

• Main Author: LI PENGWEI
• Format: Patent
• Language: Chinese; English
• Published: 09.05.2023
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CHEMICAL SURFACE TREATMENT; CHEMISTRY; CINEMATOGRAPHY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTROGRAPHY; HOLOGRAPHY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MATERIALS THEREFOR; METALLURGY; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25; NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

The invention relates to the technical field of etching processing, and provides etching equipment and a photosensitive etching process. Comprising a drying box, a photosensitive box and an etching box, and the etching box comprises a first motor, a second motor, a centrifugal tube and a workpiece mounting shaft; a containing groove is formed in the bottom of the etching box. The first end of the centrifugal tube is provided with a water absorption device, the water absorption device is immersed in the etching liquid in the containing groove, the second end of the centrifugal tube is in transmission connection with the first motor, a plurality of liquid spraying holes are distributed in the side wall of the centrifugal tube, and when the first motor rotates, the etching liquid in the centrifugal tube flows out of the liquid spraying holes and is sprayed to a workpiece installed on the workpiece installation shaft; and the second motor is adjacent to the first motor and is in transmission connection with the w