Sensor element

• Main Author: FUKUURA ATSUOMI
• Format: Patent
• Language: Chinese; English
• Published: 05.05.2023
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

A sensor element is provided. A sensor element is provided with: a first substrate; a detection unit disposed on the first substrate; and a second substrate surrounding the first substrate and supporting the first substrate. The second substrate is thicker than the first substrate. The second substrate has: a connection part connected to the first substrate; and a non-connection part that is not connected to the first substrate. The detection portion is located near the connection portion. 提供一种传感器元件。传感器元件具备：第1基板；检测部，配置于第1基板上；和第2基板，包围第1基板并支承第1基板。第2基板比第1基板厚。第2基板具有：与第1基板连接的连接部；和不与第1基板连接的非连接部。检测部位于连接部的附近。