Detection method, detection device, detection system and computer readable storage medium

• Main Author: WU LUJIE
• Format: Patent
• Language: Chinese; English
• Published: 05.05.2023
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The invention discloses a detection method, a detection device, a detection system and a nonvolatile computer readable storage medium. The detection method comprises the steps that a first light source is controlled to irradiate a to-be-detected piece, the first light source is a bright field light source, a light outlet of the first light source is provided with a light blocking piece, and the light blocking piece is used for blocking a part of the light outlet; collecting a detection image of the to-be-detected piece; and detecting defects of the detection image to output defect information. Thus, by adopting a bright field light source irradiation mode and arranging the light blocking sheet at the light outlet to shield a part of the light outlet, the sensitivity of the collected three-dimensional defects generated on the surface of the to-be-detected piece can be remarkably improved when the detection image of the to-be-detected piece is collected, the three-dimensional form of the unobvious defects on th