Mass spectrum detection device and method based on ECR ion source

• Main Authors: CHEN YOU, YU XIAOFENG, LI RUI, XU YUE, LI JINGBO
• Format: Patent
• Language: Chinese; English
• Published: 02.05.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

The invention provides a mass spectrum detection device and method based on an ECR ion source. The mass spectrum detection device based on the ECR ion source comprises the ECR ion source, a multi-pole rod mass analyzer, a detector and a power supply, the device further comprises a first ion focusing lens and an ion deceleration lens. The first ion focusing lens is arranged on an ion transmission path between the ECR ion source and the multi-pole rod mass analyzer. The ion deceleration lens is arranged on the ion transmission path and is located between the first ion focusing lens and the multi-pole rod mass analyzer; the power supply applies voltage to the first ion focusing lens and the ion deceleration lens. The method has the advantages of high sensitivity and the like. 本发明提供了基于ECR离子源的质谱检测装置和方法，所述基于ECR离子源的质谱检测装置包括ECR离子源、多极杆质量分析器、检测器和电源；还包括第一离子聚焦透镜和离子减速透镜，所述第一离子聚焦透镜设置在所述ECR离子源和多极杆质量分析器之间的离子传输路径上；所述离子减速透镜设置在所述离子传输路径上，且处于所述第一离子聚焦透镜和多极杆质量分析器之间；所述电源为所述第一离子聚焦透镜和离子减速透镜施加电压。本发明具有灵敏度高等优点。