Method and system for preparing ceramic material on surface of electrostatic chuck

• Main Authors: DING YUAN, DOU PEIJING, WU QINWEN, QIN XIAOJUAN, ZHENG LEI, ZHOU LEI
• Format: Patent
• Language: Chinese; English
• Published: 25.04.2023
• Subjects: ARTIFICIAL STONE; BASIC ELECTRIC ELEMENTS; CEMENTS; CERAMICS; CHEMISTRY; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LIME, MAGNESIA; METALLURGY; REFRACTORIES; SEMICONDUCTOR DEVICES; SLAG; TREATMENT OF NATURAL STONE

The invention discloses a preparation method and system of an electrostatic chuck surface ceramic material. The method comprises the following steps: firstly, enabling thermal infrared images at a plurality of preset time points to respectively pass through a double-branch structure comprising a first image encoder and a second image encoder so as to obtain a plurality of multi-scale particle size distribution temperature characteristic patterns; the method comprises the following steps: acquiring a plurality of multi-scale particle size distribution temperature feature maps, performing feature map expansion on the plurality of multi-scale particle size distribution temperature feature maps to obtain a plurality of multi-scale particle size distribution temperature expansion feature vectors, then enabling the plurality of multi-scale particle size distribution temperature expansion feature vectors to pass through a context encoder based on a converter to obtain decoding feature vectors, and finally, decoding