Exposure device based on spatial phase modulator and liquid crystal device

• Main Authors: SHEN DONG, LUO DUANBIN, ZHENG ZHIGANG, WANG XIAOQIAN
• Format: Patent
• Language: Chinese; English
• Published: 18.04.2023
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTROGRAPHY; FREQUENCY-CHANGING; HOLOGRAPHY; MATERIALS THEREFOR; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICAL LOGIC ELEMENTS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

The invention relates to an exposure device based on a spatial phase modulator and a liquid crystal device, which comprises a light source control module, a light intensity and polarization control module, a focusing servo module, a sample placement module, a voltage control module and a monitoring module, the light intensity and polarization control module comprises a light intensity modulation assembly used for receiving the light beam output by the light source control module and modulating the light intensity of each pixel point in the light beam; the polarization modulation assembly is used for modulating the polarization state of each pixel point in the light beam emitted by the light intensity modulation assembly; the first switchable reflector is used for switching to enter or exit from a light path between the light intensity modulation assembly and the polarization modulation assembly; the focusing servo module and the sample placement module are switched to directly face the polarization modulation