Exposure device based on spatial phase modulator and liquid crystal device
The invention relates to an exposure device based on a spatial phase modulator and a liquid crystal device, which comprises a light source control module, a light intensity and polarization control module, a focusing servo module, a sample placement module, a voltage control module and a monitoring...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
18.04.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The invention relates to an exposure device based on a spatial phase modulator and a liquid crystal device, which comprises a light source control module, a light intensity and polarization control module, a focusing servo module, a sample placement module, a voltage control module and a monitoring module, the light intensity and polarization control module comprises a light intensity modulation assembly used for receiving the light beam output by the light source control module and modulating the light intensity of each pixel point in the light beam; the polarization modulation assembly is used for modulating the polarization state of each pixel point in the light beam emitted by the light intensity modulation assembly; the first switchable reflector is used for switching to enter or exit from a light path between the light intensity modulation assembly and the polarization modulation assembly; the focusing servo module and the sample placement module are switched to directly face the polarization modulation |
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Bibliography: | Application Number: CN202211341017 |