Vacuum damping device for electron microscope

• Main Author: LIU QIWU
• Format: Patent
• Language: Chinese; English
• Published: 18.04.2023
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; LIGHTING; MEANS FOR DAMPING VIBRATION; MECHANICAL ENGINEERING; SHOCK-ABSORBERS; SPRINGS; THERMAL INSULATION IN GENERAL; WEAPONS

The invention provides a vacuum damping device for an electron microscope, and belongs to the technical field of vacuum device damping, and the vacuum damping device comprises an electron microscope sample chamber which is suitable for placing a to-be-detected sample; the bottom end of the electron microscope sample chamber is connected with the vacuum equipment through a damping structure; and the damping structure comprises a damping corrugated pipe, and a damping vibration attenuation ring and a vibration attenuation adjusting ring which are arranged on the outer side of the damping corrugated pipe. The vacuum damping device for the electron microscope is suitable for placing an electron microscope sample chamber of a sample to be detected, the electron microscope sample chamber is connected with vacuum equipment through a damping structure, and the damping structure comprises a damping corrugated pipe, a damping vibration attenuation ring and a vibration attenuation adjusting ring, damping of the electron