Storage device, carrying equipment and method for wafer carrier

The embodiment of the invention discloses a wafer carrier storage device, carrying equipment and a carrying method. The storage device comprises at least two bearing bins used for bearing the wafer carriers; the at least two bearing bins are connected to different positions of the rotating assembly...

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Bibliographic Details
Main Author CHEN TIANZHU
Format Patent
LanguageChinese
English
Published 07.04.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The embodiment of the invention discloses a wafer carrier storage device, carrying equipment and a carrying method. The storage device comprises at least two bearing bins used for bearing the wafer carriers; the at least two bearing bins are connected to different positions of the rotating assembly respectively; the rotating assembly is used for changing the positions of the at least two bearing bins through rotation. 本申请实施例公开了一种晶圆载体的储存装置、搬送设备和搬送方法。该储存装置包括：至少两个承载仓，用于承载所述晶圆载体；旋转组件，所述至少两个承载仓分别连接在所述旋转组件的不同位置；所述旋转组件用于通过旋转改变所述至少两个承载仓的位置。
Bibliography:Application Number: CN202110918563