Storage device, carrying equipment and method for wafer carrier
The embodiment of the invention discloses a wafer carrier storage device, carrying equipment and a carrying method. The storage device comprises at least two bearing bins used for bearing the wafer carriers; the at least two bearing bins are connected to different positions of the rotating assembly...
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Main Author | |
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Format | Patent |
Language | Chinese English |
Published |
07.04.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The embodiment of the invention discloses a wafer carrier storage device, carrying equipment and a carrying method. The storage device comprises at least two bearing bins used for bearing the wafer carriers; the at least two bearing bins are connected to different positions of the rotating assembly respectively; the rotating assembly is used for changing the positions of the at least two bearing bins through rotation.
本申请实施例公开了一种晶圆载体的储存装置、搬送设备和搬送方法。该储存装置包括:至少两个承载仓,用于承载所述晶圆载体;旋转组件,所述至少两个承载仓分别连接在所述旋转组件的不同位置;所述旋转组件用于通过旋转改变所述至少两个承载仓的位置。 |
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Bibliography: | Application Number: CN202110918563 |