Micro electro mechanical infrared light sensing device and manufacturing method thereof

The invention provides a micro-electro-mechanical infrared light sensing device and a manufacturing method thereof. The micro-electro-mechanical infrared light sensing device comprises a substrate and an infrared light sensing element arranged above the substrate. The infrared light sensing element...

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Bibliographic Details
Main Authors CHEN MINGFA, GUO QINROU, LI BAIXUN
Format Patent
LanguageChinese
English
Published 07.04.2023
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Summary:The invention provides a micro-electro-mechanical infrared light sensing device and a manufacturing method thereof. The micro-electro-mechanical infrared light sensing device comprises a substrate and an infrared light sensing element arranged above the substrate. The infrared light sensing element is provided with a sensing area and a light absorption area which are not overlapped with each other. The infrared light sensing element comprises two infrared light absorption structures, an infrared light sensing layer and an interdigital electrode structure. Each of the two infrared light absorption structures comprises at least one infrared light absorption layer, and the two infrared light absorption structures are distributed in the sensing area and the light absorption area. The infrared light sensing layer is arranged between the two infrared light absorption structures, and the infrared light sensing layer is located in the sensing area and does not extend to the light absorption area. The interdigital ele
Bibliography:Application Number: CN202210354843