Quartz container carbon fumigating device and carbon fumigating method

• Main Authors: CHAI CHEN, LIU ZHIYUAN, LEI TONGGUANG, MA YUANFEI, GUO WEICAI, WANG BO, LIN QUAN
• Format: Patent
• Language: Chinese; English
• Published: 07.04.2023
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CRYSTAL GROWTH; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

The invention relates to a carbon fumigating device and method for a quartz container in the technical field of carbon fumigating of the quartz container, and the carbon fumigating device comprises a heating furnace which is internally provided with a first temperature zone and a second temperature zone; the loader penetrates through the first temperature zone and the second temperature zone, a bearing cavity of the quartz container is formed in the loader, an air inlet end is formed on one side, far away from the second temperature zone, of the loader, and an air outlet end is formed on one side, far away from the first temperature zone, of the loader; a first pipeline is connected between the inert gas tank and the gas inlet end; a second pipeline is connected between the evaporation bottle and the gas inlet end, a third pipeline is connected between the evaporation bottle and the inert gas tank, and a port, located in the evaporation bottle, of the second pipeline is higher than a port, located in the evap