Quartz container carbon fumigating device and carbon fumigating method
The invention relates to a carbon fumigating device and method for a quartz container in the technical field of carbon fumigating of the quartz container, and the carbon fumigating device comprises a heating furnace which is internally provided with a first temperature zone and a second temperature...
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Main Authors | , , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
07.04.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The invention relates to a carbon fumigating device and method for a quartz container in the technical field of carbon fumigating of the quartz container, and the carbon fumigating device comprises a heating furnace which is internally provided with a first temperature zone and a second temperature zone; the loader penetrates through the first temperature zone and the second temperature zone, a bearing cavity of the quartz container is formed in the loader, an air inlet end is formed on one side, far away from the second temperature zone, of the loader, and an air outlet end is formed on one side, far away from the first temperature zone, of the loader; a first pipeline is connected between the inert gas tank and the gas inlet end; a second pipeline is connected between the evaporation bottle and the gas inlet end, a third pipeline is connected between the evaporation bottle and the inert gas tank, and a port, located in the evaporation bottle, of the second pipeline is higher than a port, located in the evap |
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Bibliography: | Application Number: CN202211447123 |