Liquid feeding device

The embodiment of the invention relates to the field of semiconductors, and provides a liquid feeding device which at least can comprise a driving module, a first cavity and a second cavity, the first cavity is provided with a first outlet and a second outlet, the first outlet is communicated with a...

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Bibliographic Details
Main Authors CHEON YOUNG-SUN, KIM JEONG-MIN, REN CHUANWEN, TAO SHOUMING
Format Patent
LanguageChinese
English
Published 04.04.2023
Subjects
CONTROLLING
MEASURING
MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL
METERING BY VOLUME
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
TESTING
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Summary:The embodiment of the invention relates to the field of semiconductors, and provides a liquid feeding device which at least can comprise a driving module, a first cavity and a second cavity, the first cavity is provided with a first outlet and a second outlet, the first outlet is communicated with a liquid inlet of the second cavity, and the driving module drives liquid to the first cavity based on first preset pressure and preset duration; the control module is used for monitoring the volume of the liquid in the first cavity, if the quotient of the volume and the preset duration is not equal to the preset flow, the liquid in the first cavity is discharged through the second outlet, and the numerical value of the first preset pressure is adjusted according to the magnitude relation of the quotient and the preset flow; the actual flow corresponding to the first preset pressure is equal to the preset flow. The embodiment of the invention is beneficial to improving the flow precision of the liquid feeding device
Bibliography:Application Number: CN202111154837