Sensor

• Main Authors: UMEHARA HIROMICHI, ISODA TAKAHIRO, TAKASUGI KEISUKE, INAGE KENJI
• Format: Patent
• Language: Chinese; English
• Published: 24.03.2023
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

The invention relates to a sensor. The magnetic sensor includes an insulating layer including a flat portion and a protruding portion, a first MR element, and a second MR element. The protruding portion has a first inclined surface and a second inclined surface. The first MR element is disposed on the first inclined surface. The second MR element is disposed on the second inclined surface. The protruding portion extends in a first direction parallel to the upper surface of the substrate, and includes a plurality of recessed portions that are recessed in the direction parallel to the upper surface of the substrate at end portions of the protruding portion in the first direction, respectively. 本发明涉及一种传感器。磁传感器具备包含平坦部和突出部的绝缘层、第一MR元件、以及第二MR元件。突出部具有第一倾斜面和第二倾斜面。第一MR元件配置在第一倾斜面之上。第二MR元件配置在第二倾斜面之上。突出部沿着与基板的上表面平行的第一方向延伸，并且包含在突出部中的第一方向的端部分别向与基板的上表面平行的方向凹陷的多个凹部。