Pressure sensor device
This pressure sensor device is provided with: a first substrate having an external connection terminal; and a second substrate which is laminated on the upper surface of the first substrate and in which a first through-opening and a second through-opening are formed. And a pressure sensor element th...
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Main Author | |
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Format | Patent |
Language | Chinese English |
Published |
21.03.2023
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Subjects | |
Online Access | Get full text |
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