Pressure sensor device

• Main Author: SUZU SOICHIRO
• Format: Patent
• Language: Chinese; English
• Published: 21.03.2023
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

This pressure sensor device is provided with: a first substrate having an external connection terminal; and a second substrate which is laminated on the upper surface of the first substrate and in which a first through-opening and a second through-opening are formed. And a pressure sensor element th...