Pressure sensor device

• Main Author: SUZU SOICHIRO
• Format: Patent
• Language: Chinese; English
• Published: 21.03.2023
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

This pressure sensor device is provided with: a first substrate having an external connection terminal; and a second substrate which is laminated on the upper surface of the first substrate and in which a first through-opening and a second through-opening are formed. And a pressure sensor element that has a diaphragm structure and is mounted on the upper surface of the second substrate so as to close the first through-opening by means of the diaphragm structure. And a cover that is mounted on the upper surface of the second substrate so as to cover the pressure sensor element, and that forms a first flow path that guides a first fluid to the upper surface of the diaphragm structure. A second flow path is formed between the first substrate and the second substrate, said second flow path communicating with the first through-opening from the second through-opening and guiding a second fluid to the lower surface of the diaphragm structure. 本发明的压力传感器装置具备具有外部连接端子的第一基板、层叠于上述第一基板的上面且形成有第一贯通开口部以及第二贯通开口部的第二基板、具有隔膜构造且以通