High-refractive-index expanded-cavity vertical-cavity surface-emitting laser, preparation method and application thereof

• Main Authors: TANG ZHITING, LI CHUANLIN, WU JIANG, REN AOBO, LIU JILIN, LI YAN, ZHAO FEIYUN
• Format: Patent
• Language: Chinese; English
• Published: 14.03.2023
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRICITY

The invention discloses a high-refractive-index expanded-cavity vertical-cavity surface-emitting laser, a preparation method and application thereof, relates to the technical field of semiconductors, and solves the problems that an existing vertical-cavity surface-emitting laser is large in line width, and narrow line width is difficult to control in the prior art. The laser comprises a top electrode, a p-type Bragg reflector group, an oxide layer, an active region, an n-type expansion layer, an n-type Bragg reflector group, a substrate and a bottom electrode from top to bottom, the n-type expansion layer is AlyGa1-yAs, and y is 0.1-0.9. By setting the n-type expansion layer and setting the n-type expansion layer to be made of a specific material, resistance and free carrier absorption in the expansion layer are inhibited, the effective cavity length of the laser can be effectively increased, the resonant cavity length is increased, the output power is increased, the line width enhancement factor alpha is red