Drive control circuit and control method of electromagnetic drive type Fabry-Perot filter chip

• Main Authors: YU YITING, WANG FEI, JING XIALEI, ZHOU KUI
• Format: Patent
• Language: Chinese; English
• Published: 14.03.2023
• Subjects: CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PERFORMING OPERATIONS; PHYSICS; REGULATING; TRANSPORTING

The invention relates to a drive control circuit of an electromagnetic drive type Fabry-Perot filter chip, which comprises a printed circuit board, a light through hole formed in the center of the printed circuit board, a microprocessor and an excitation circuit connected with the microprocessor, the excitation circuit comprises a current driving chip connected with the microprocessor and a hollow electromagnetic coil which is connected with the current driving chip and is coaxial with the light through hole, and the microprocessor is used for respectively outputting two paths of PWM signals with different duty ratios and directions; the current driving chip receives the PWM signal and outputs corresponding currents with different magnitudes and opposite directions, and the hollow electromagnetic coil is used for receiving the currents and performing excitation so as to drive a movable mirror of the Fabry-Perot filter chip to move up and down to change the length of a cavity of the Fabry-Perot filter chip; ac