Semiconductor structure and manufacturing method thereof

• Main Authors: ZONGHAN ZHUANG, ZHANG RONGHONG, CHEN SHICHENG, JIANG GUOCHENG, YAO QIANNING, LIN ZHICHANG
• Format: Patent
• Language: Chinese; English
• Published: 07.03.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention provides a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes a substrate and a bottom isolation feature formed over the substrate. The semiconductor structure also includes a bottom semiconductor layer formed over the bottom isolation feat...