Polymer/silicon nitride hybrid integrated variable optical attenuator and preparation method thereof

• Main Authors: YIN YUEXIN, ZHANG DAMING, WANG FEI, XU ZHIYUAN, XU XINRU, DING YINGZHI, GUAN BINLI
• Format: Patent
• Language: Chinese; English
• Published: 07.03.2023
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

The invention discloses a polymer/silicon nitride hybrid integrated variable optical attenuator and a preparation method thereof, and belongs to the technical field of optical waveguide variable optical attenuators. The modulator is composed of a silicon substrate, a silicon dioxide lower wrapping layer, a core layer waveguide, a polymer upper wrapping layer and a metal modulation electrode. The core layer waveguide is composed of a silicon nitride input straight waveguide, a silicon nitride input tapering waveguide, a polymer core layer straight waveguide, a silicon nitride output tapering waveguide and a silicon nitride output straight waveguide. The silicon nitride input tapering waveguide and the silicon nitride output tapering waveguide are embedded in the polymer core layer straight waveguide. When voltage is applied to the metal modulation electrode, phase difference can be generated when light passes through the effective area where the temperature changes, the position of an auto-image is changed, th