High-stability suspension Al2O3 polishing solution and preparation method thereof
The invention discloses a high-stability suspension Al2O3 polishing solution and a preparation method thereof.The preparation method comprises the following specific steps that S1, a dispersing agent, alpha-aluminum oxide, a pH regulator and a thickening agent are sequentially added into deionized w...
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Main Authors | , , , |
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Format | Patent |
Language | Chinese English |
Published |
07.03.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The invention discloses a high-stability suspension Al2O3 polishing solution and a preparation method thereof.The preparation method comprises the following specific steps that S1, a dispersing agent, alpha-aluminum oxide, a pH regulator and a thickening agent are sequentially added into deionized water and mixed to be uniform; and S2, adding an oxidizing agent and the rest of deionized water into the mixed solution obtained in the S1, and uniformly mixing to obtain the Al2O3 polishing solution. The polishing solution is prepared through a two-step method, in the first step, a mixed dispersing agent is added into an aluminum oxide grinding material, full stirring is conducted to enable the aluminum oxide grinding material to be fully modified, a pH adjusting agent is slowly added, uniform stirring continues to be conducted, positive and negative charges on the surface of aluminum oxide are distributed in a balanced mode, and the step is a key step for obtaining the high-Zeta-potential-value polishing solution |
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Bibliography: | Application Number: CN202211561152 |