Overall parameter calibration method and calibration system for ellipsometer

• Main Authors: GUO CHUNFU, SHI YATING, WANG RUI, LI WEIQI
• Format: Patent
• Language: Chinese; English
• Published: 03.03.2023
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The invention provides an ellipsometer global parameter calibration method and system, and the method comprises the steps: obtaining a measurement light intensity signal of a standard sample piece, carrying out the Fourier analysis, and calculating a measurement Fourier coefficient in a full spectrum range; calculating polarization characteristic parameters of the ellipsometer according to structural parameters of the ellipsometer; calculating a theoretical Fourier coefficient according to the polarization characteristic parameter and the global parameter; calculating an evaluation function between the theoretical Fourier coefficient and the measurement Fourier coefficient, and iteratively updating the evaluation function by continuously adjusting structural parameters and global parameters of the to-be-calibrated dual-rotation compensator type Mueller matrix ellipsometer until the evaluation function is smaller than a set threshold value, so as to obtain calibrated global parameters. According to the global