Automated showerhead tilt adjustment

• Main Authors: WILTSE JOHN MICHAEL, KMELACK, BRIAN, ANTHONY, LUO BIN, HIST JAKOB LEIGH, TEHRANI SAM JAFRIAN
• Format: Patent
• Language: Chinese; English
• Published: 28.02.2023
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

In several examples, an automated tilting system is provided for adjusting the orientation of a component in a substrate processing chamber. The automated tilt system includes at least one tilt adjustment motor arranged to cooperate with the component, and is connected to a portion of the component...