Automated showerhead tilt adjustment

• Main Authors: WILTSE JOHN MICHAEL, KMELACK, BRIAN, ANTHONY, LUO BIN, HIST JAKOB LEIGH, TEHRANI SAM JAFRIAN
• Format: Patent
• Language: Chinese; English
• Published: 28.02.2023
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

In several examples, an automated tilting system is provided for adjusting the orientation of a component in a substrate processing chamber. The automated tilt system includes at least one tilt adjustment motor arranged to cooperate with the component, and is connected to a portion of the component by a joint. The joint is configured such that automated rotational movement by the at least one tilt adjustment motor will transmit corresponding axial movement relative to the at least one tilt adjustment motor or the reference structure into the connecting portion of the component to adjust the direction of the component in the process chamber. 在若干示例中，自动化倾斜系统被提供用于调整在衬底处理室中的部件的方位。自动化倾斜系统包含被布置成与部件协作的至少一个倾斜调整马达，并且通过接合件连接至部件的部分。接合件被配置成使得由该至少一个倾斜调整马达的自动化旋转运动将相对于至少一个倾斜调整马达或基准结构的对应轴向移动传入部件的连接部分，以调整在处理室中的部件的方向。