Probe card, operation method of probe card, and test system

The embodiment of the invention provides a probe card, an operation method of the probe card and a test system, the probe card comprises a long needle layer, the long needle layer comprises a plurality of subareas, and each subarea is internally provided with a plurality of probes; the plurality of...

Full description

Saved in:
Bibliographic Details
Main Authors HU XIANDE, DU JUNGE, ZHONG MINGXIU
Format Patent
LanguageChinese
English
Published 03.02.2023
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:The embodiment of the invention provides a probe card, an operation method of the probe card and a test system, the probe card comprises a long needle layer, the long needle layer comprises a plurality of subareas, and each subarea is internally provided with a plurality of probes; the plurality of temperature adjusting modules and the plurality of height adjusting modules are positioned on the long needle layer; each temperature adjusting module is used for changing the temperature of the temperature adjusting module so as to adjust the temperature of the probe in one subarea; each height adjusting module is used for adjusting the height of the probe in one partition; and the control layer is used for controlling the temperature adjusting module to adjust the temperature of the probe to the test temperature and is also used for controlling the height adjusting module to adjust the height of the probe to the preset height. According to the embodiment of the invention, the accuracy of the test result of the pr
Bibliography:Application Number: CN202110858077