Flexible strain sensor with substrate having extremely low temperature effect and preparation method thereof

• Main Authors: YANG ZHUOQING, LI MENGQIU
• Format: Patent
• Language: Chinese; English
• Published: 20.01.2023
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TESTING; TRANSPORTING

The invention relates to a flexible strain sensor with a substrate having an extremely low temperature effect, and the sensor comprises a metal composite flexible substrate which comprises alternately arranged polymers and metal microstructures; the strain sensitive grid resistor is arranged above the metal composite flexible substrate, and the grid direction of the strain sensitive grid resistor is consistent with the arrangement direction of the metal microstructures in the metal composite flexible substrate. The invention also relates to a preparation method of the flexible strain sensor with the substrate having the extremely low temperature effect. The strain direction detected by the flexible strain sensor is consistent with the low thermal expansion coefficient direction of the metal composite flexible substrate, and the thermal deformation rate of the metal composite flexible substrate in the direction is low, so that the influence of the substrate temperature effect on strain measurement in the strai