Gate valve device, cleaning method and mechanical equipment

• Main Authors: YAO JIANQIAO, WANG ZHENGZHENG, WANG LIUGUANG, WANG HONGYANG
• Format: Patent
• Language: Chinese; English
• Published: 17.01.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The embodiment of the invention provides a gate valve device, a cleaning method and mechanical equipment. The gate valve device comprises a cleaning assembly, a first lifting assembly and a second lifting assembly, and the cleaning assembly is arranged on the second lifting assembly; the first lifting assembly is used for controlling whether an opening, close to one side of the swing gate valve, of the vacuum cavity is in a closed state or not. And the second lifting assembly is used for controlling the cleaning assembly to clean the swing gate valve under the condition that the opening, close to one side of the swing gate valve, of the vacuum chamber is in a closed state. Thus, vacuum on one side of the vacuum cavity can be isolated through the first lifting assembly, the swing gate valve can be cleaned in the equipment operation process, and the working process of mechanical equipment does not need to be stopped; and the swing gate valve can be automatically cleaned through the second lifting assembly, the