METHOD AND SYSTEM FOR GENERATING A DIFFRACTIVE IMAGE

• Main Authors: JENSEN BENJAMIN J, BUIJS BART
• Format: Patent
• Language: Chinese; English
• Published: 17.01.2023
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

Methods and systems for generating diffraction images include acquiring a plurality of frames from a direct detection detector in response to irradiating a sample with an electron beam. A plurality of diffraction peaks in the plurality of frames are identified. A first dose rate for at least one of the identified diffraction peaks is estimated in a count mode. If the first dose rate does not exceed a threshold dose rate, a diffraction image containing the diffraction peaks is generated by counting electron detection events. A value of a pixel belonging to the diffraction peak is determined using a first set of count parameter values corresponding to a first overlap region. A value of a pixel that does not belong to any of the plurality of diffraction peaks is determined using a second set of count parameter values corresponding to a second different overlap region. 用于生成衍射图像的方法和系统包括响应于用电子束照射样本而从直接检测检测器获取多个帧。识别所述多个帧中的多个衍射峰。在计数模式中估计所识别衍射峰中的至少一个衍射峰的第一剂量率。如果所述第一剂量率不超过阈值剂量率，则通过对电子检测事件计数来生成包含所述衍射峰的衍射图像。用对应于第一重合区域的计数