Novel cerium-based particles and polishing slurry composition including same
The present invention relates to a novel cerium-based particle and a polishing slurry composition comprising the same, and more particularly, to a cerium-based particle and a polishing slurry composition comprising the same, the cerium-based particle comprising: a self-assembly of microparticles; an...
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Main Authors | , , |
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Format | Patent |
Language | Chinese English |
Published |
17.01.2023
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention relates to a novel cerium-based particle and a polishing slurry composition comprising the same, and more particularly, to a cerium-based particle and a polishing slurry composition comprising the same, the cerium-based particle comprising: a self-assembly of microparticles; and an organic matter.
本发明涉及一种新型铈基粒子及包括其的抛光浆料组合物,更具体地,涉及一种铈基粒子及包括其的抛光浆料组合物,其中所述铈基粒子包括:微粒子的自组装体;以及有机物。 |
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Bibliography: | Application Number: CN202210809900 |