Plasma jet device for surface modification of insulating material

• Main Authors: ZHENG YUESHENG, ZHENG YIZE, HE TONGTONG
• Format: Patent
• Language: Chinese; English
• Published: 13.01.2023
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS

The invention relates to a plasma jet device for surface modification of an insulating material. Comprising a plasma generating device, a plasma power supply, a gas mixing device and a three-dimensional mobile platform. Helium, argon and a reaction medium TEOS are mixed by the gas mixing device and are introduced into a medium pipe of the plasma generating device; the plasma power supply provides high-voltage excitation, and plasma jet is generated in the medium pipe; the insulating material to be treated is controlled by the three-dimensional mobile platform to move at a constant speed below the plasma jet, so that the whole surface of the material is uniformly treated. The plasma material processing device overcomes the defects of an existing plasma material processing device, chemical characteristics of helium and argon are complementary, the generation efficiency of active particles is improved, and therefore the insulating material processing effect is improved. 本发明涉及一种用于绝缘材料表面改性的等离子体射流装置。包括：等离子体发生装置、等离子