Cooling water flow control system for excimer laser discharge cavity

The invention provides a cooling water flow control system for a discharge cavity of an excimer laser, which comprises a radiator and a temperature sensor which are arranged in the discharge cavity, a PID (Proportion Integration Differentiation) module arranged outside the discharge cavity, a coolin...

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Bibliographic Details
Main Authors SHA PENGFEI, WANG JIAZAN, ZHU GUIPENG, YANG JUNHONG, SUN TAO, LIU HAO, HU JINFU
Format Patent
LanguageChinese
English
Published 03.01.2023
Subjects
CONTROLLING
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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Summary:The invention provides a cooling water flow control system for a discharge cavity of an excimer laser, which comprises a radiator and a temperature sensor which are arranged in the discharge cavity, a PID (Proportion Integration Differentiation) module arranged outside the discharge cavity, a cooling water machine for providing cooling water, and a pipeline module for connecting the radiator and the cooling water machine, the pipeline module comprises a first pipeline enabling cooling water to flow from the cooling-water machine to the radiator and a second pipeline enabling the cooling water to flow from the radiator to the cooling-water machine, the first pipeline comprises a first branch and a second branch which are connected in parallel, an electromagnetic proportional valve is arranged on the first branch, and an electric proportional valve is arranged on the second branch. The PID module is in communication connection with the electromagnetic proportional valve, the electric proportional valve and the
Bibliography:Application Number: CN202211288982