Apparatus and method for rotating optical objective

• Main Authors: LEONG JENN-KUEN, XU ZHIWEI STEVE, ROMANOVSKY ANATOLY, KAVADJIEV, DMITRI, WANG CHUNHAI, WHITESIDE BRIAN
• Format: Patent
• Language: Chinese; English
• Published: 23.12.2022
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; TESTING

A dark-field optical system may include a rotating objective assembly having a dark-field objective that collects light from a sample within a light-collecting numerical aperture, where the dark-field objective includes an inlet aperture and an outlet aperture that are symmetrical relative azimuthal with respect to an optical axis; a swivel bearing allowing at least a portion of the dark field objective including the inlet aperture and the outlet aperture to rotate about the optical axis; and a rotation driver that controls a rotation angle of the inlet aperture. The system may also include a multi-angle illumination subsystem to illuminate the sample using an illumination beam passing through the entrance aperture at two or more illumination azimuth angles, wherein the azimuth angle of the illumination beam on the sample can be selected by rotating the objective lens to any of the two or more illumination azimuth angles. 一种暗场光学系统可包含旋转物镜组合件，所述旋转物镜组合件具有：暗场物镜，其在集光数值孔径内从样本收集光，其中所述暗场物镜包含相对于光学轴成对称相对方位角的入口孔隙及出口孔隙；旋