Semiconductor assembly and forming method thereof, and optical coupling system

• Main Authors: XU MINXIANG, TANG CHENGZHE, ZHOU CHUNPU, CHEN JIANHONG, HONG YONGZHI, CHO LANOU
• Format: Patent
• Language: Chinese; English
• Published: 23.12.2022
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

The invention provides a semiconductor assembly, a forming method thereof and an optical coupling system. Edge couplers with high coupling efficiency and low polarization dependent loss, and methods of making edge couplers, are disclosed. In one embodiment, a semiconductor assembly for optical coupling is disclosed. The semiconductor component includes: a substrate; an optical waveguide over the substrate; and a plurality of layers over the optical waveguide. The plurality of layers includes a plurality of coupling posts disposed at an edge of the semiconductor component. The plurality of coupling posts form an edge coupler configured to optically couple the optical waveguide to an optical fiber located at an edge of the semiconductor assembly. 一种半导体组件及其形成方法以及光耦合系统。公开具有高耦合效率和低偏振相关损耗的边缘耦合器，以及制造边缘耦合器的方法。在一个实施例中，公开用于光耦合的半导体组件。半导体组件包括：衬底；光波导，在衬底之上；及多个层，在光波导之上。多个层包括设置在半导体组件的边缘的多个耦合柱。多个耦合柱形成边缘耦合器，其被配置为将光波导光学耦合到位于半导体组件的边缘的光纤。