Piezoelectric MEMS hydrophone with pressure-resistant structure

• Main Authors: ZHANG YING, ZHANG HAO, ZOU XIAOMENG, YANG HUA
• Format: Patent
• Language: Chinese; English
• Published: 23.12.2022
• Subjects: MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES; MEASURING; PHYSICS; TESTING

The invention belongs to the technical field of hydrophones, discloses a piezoelectric MEMS hydrophone with a pressure-resistant structure, and aims to solve the problem of poor pressure resistance of the conventional piezoelectric MEMS hydrophone. The hydrophone comprises a sound transmission shell, a substrate, an SOI layer and a sensing layer. A liquid filling area is formed between the sound transmission shell and a whole formed by the substrate, the SOI layer and the sensing layer; the sensing layer comprises a plurality of sensing units; back cavities are formed in the positions, corresponding to the sensing units, of the back face of the SOI layer; the back surface of the SOI layer is also provided with a micro-channel for communicating the liquid filling area and each back cavity; the back cavity is filled with air, the liquid filling area is filled with liquid, and the micro-channel, the back cavity, the sensing layer and the liquid in the liquid filling area jointly form a pressure-resistant hydrost